Integrated Electrostatically- and Piezoelectrically-Transduced Contour-Mode MEMS Resonator on Silicon-on-Insulator (SOI) Wafer
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- - Computer And It: Science And Engineering
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- - Educational Learning, Policy And Curriculcum Development
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Book Details :
Integrated Electrostatically- and Piezoelectrically-Transduced Contour-Mode MEMS Resonator on Silicon-on-Insulator (SOI) Wafer